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    Title :

    Micro-machining Process for Optical Device Employing Pulse-modulated Electron-Beam-Excited Plasma


    Contributors:
    Ohta, T. (author) / Tomekawa, Y. (author) / Ito, M. (author) / Takeda, K. (author) / Iwasaki, M. (author) / Yamakawa, K. (author) / Hori, M. (author) / Goto, T. (author) / IEEE / LEOS

    Conference:

    INTERNATIONAL CONFERENCE, Optical MEMS and their applications ; 2004 ; Takamatsu, Japan



    Publication date :

    2004-01-01


    Size :

    2 pages


    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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