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    Title :

    Monolithic Fabrication of 54.74 Degree Inclined Scanning Mirror and Optical benches


    Contributors:
    Lee, K.-N. (author) / Jang, Y.-H. (author) / Kim, H. (author) / Kim, Y.-K. (author) / Lee, Y.-S. (author) / IEEE / LEOS

    Conference:

    INTERNATIONAL CONFERENCE, Optical MEMS and their applications ; 2004 ; Takamatsu, Japan



    Publication date :

    2004-01-01


    Size :

    2 pages


    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





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