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    Title :

    Micromachining of Silicon Dioxide in Perfluoropropane Plasma for Microelectronic Applications



    Conference:

    9th, International Conference on Smart Materials, Structures and Systems ; 1999 ; Bangalore, India



    Publication date :

    1999-01-01


    Size :

    7 pages


    Remarks:

    in conjunction with the ninth National Seminar on Aerospace Structures; Includes bibliographical references and index



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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