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    Title :

    Study on high-accuracy displacement interferometer for lithography application [5662-63]



    Conference:

    International symposium; 5th, Fifth international symposium on laser precision microfabrication ; 2004 ; Nara, Japan



    Publication date :

    2004-01-01


    Size :

    5 pages


    Remarks:

    Also known as LPM 2004.




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Lithography in UV photoresist using NSOM [5662-13]

    Lin, Y. / Hong, M. H. / Wang, W. J. et al. | British Library Conference Proceedings | 2004


    High-accuracy micromachining of ceramics by frequency-tripled Nd:YAG lasers [5662-92]

    Gillner, A. / Hartmann, C. / SPIE et al. | British Library Conference Proceedings | 2004


    Laser machinable glass [5662-06]

    Koyo, H. / Shojiya, M. / Tsunetomo, K. et al. | British Library Conference Proceedings | 2004


    Performance of liquid xenon jet laser-produced-plasma light source for EUV lithography [5662-58]

    Suganuma, T. / Abe, T. / Komori, H. et al. | British Library Conference Proceedings | 2004


    Reliability of high-power multimode pump modules [5662-78]

    Pflueger, S. / Duesterberg, R. / Rossin, V. et al. | British Library Conference Proceedings | 2004