Development of EUV light-source by CO~2-laser-produced plasma with nano-structured SnO~2 targets (LPM 2004 Student Paper Award: Poster) [5662-49]
International symposium; 5th, Fifth international symposium on laser precision microfabrication ; 2004 ; Nara, Japan
2004-01-01
6 pages
Also known as LPM 2004.
Conference paper
English
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