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    Title :

    Development of EUV light-source by CO~2-laser-produced plasma with nano-structured SnO~2 targets (LPM 2004 Student Paper Award: Poster) [5662-49]



    Conference:

    International symposium; 5th, Fifth international symposium on laser precision microfabrication ; 2004 ; Nara, Japan



    Publication date :

    2004-01-01


    Size :

    6 pages


    Remarks:

    Also known as LPM 2004.




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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