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    Title :

    Out-of-plane MEMS shutter with continuous motion capability for VOA application


    Contributors:
    Lai, Y.-J. (author) / Wu, C.-Y. (author) / Lee, C. (author) / Lin, Y.-S. (author) / Chen, W.-C. (author) / Chen, C. (author) / Tsai, M.-H. (author) / Huang, R.-S. (author) / Lin, M.-S. (author) / Guo li Taiwan da xue

    Conference:

    5th, Pacific Rim conference on lasers and electro-optics; photonics lights innovation: from nano-structures and devices to systems and networks ; 2003 ; Taipei, Taiwan



    Publication date :

    2003-01-01


    Size :

    141 pages


    Remarks:

    Includes bibliographic references and author index



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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