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    Title :

    Compact electron-based EUV and ultrashort hard x-ray sources (Invited Paper) [5196-28]



    Conference:

    Conference, Laser-generated and other laboratory X-ray and EUV sources, optics and applications; Laser-generated and other laboratory X-ray and EUV sources, optics and applications



    Publication date :

    2004-01-01


    Size :

    12 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    High-efficiency tin-based EUV sources [5196-14]

    Richardson, M. C. / Koay, C.-S. / Keyser, C. K. et al. | British Library Conference Proceedings | 2004


    Overview of x-ray spectroscopy of laser-produced plasmas (Invited Paper) [5196-19]

    Rosmej, F. B. / Faenov, A. Y. / Pikuz, T. A. et al. | British Library Conference Proceedings | 2004


    EUV lithography development in Europe: present status and perspectives (Invited Paper) [5196-07]

    Ceccotti, T. / SPIE | British Library Conference Proceedings | 2004


    Micro x-ray sources from femtosecond laser plasmas [5196-39]

    Serbanescu, C. G. / Santiago, J. / Fedosejevs, R. et al. | British Library Conference Proceedings | 2004


    Compact electron-based ultrashort hard-x-ray source

    Egbert, A. / Mader, B. / Tkachenko, B. et al. | IEEE | 2003