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    Title :

    Comparison of roughness measurement with atomic force microscopy and interference microscopy [5188-49]



    Conference:

    Annual conference, Advanced characterization techniques for optics, semiconductors, and nanotechnologies



    Publication date :

    2003-01-01


    Size :

    8 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Advanced transmission electron microscopy for nano-optics (Invited Paper) [5188-28]

    Kaiser, U. A. / International Society for Optical Engineering | British Library Conference Proceedings | 2003


    Photothermal microscopy and laser damage in optical components (Invited Paper) [5188-22]

    Commandre, M. J. / Natoli, J. Y. / Amra, C. et al. | British Library Conference Proceedings | 2003


    Comparative linewidth measurements on chrome and MoSi structures using newly developed microscopy methods [5188-40]

    Bodermann, B. / Mirande, W. / Kerwien, N. et al. | British Library Conference Proceedings | 2003


    Characterizing surface roughness of thin films by polarized light scattering (Invited Paper) [5188-33]

    Germer, T. A. / Fasolka, M. J. / International Society for Optical Engineering | British Library Conference Proceedings | 2003


    Absolute high-accuracy deflectometric measurement of topography [5188-39]

    Illemann, J. / International Society for Optical Engineering | British Library Conference Proceedings | 2003