Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Thin film 193-nm TNK measurement using multidomain genetic algorithm (MDGA) with a combination of Beam Profile Reflectometry (BPR), Absolute Ellipsometry (AE), and spectroscopic ellipsometry (SE) [5188-04]



    Conference:

    Annual conference, Advanced characterization techniques for optics, semiconductors, and nanotechnologies



    Publication date :

    2003-01-01


    Size :

    13 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Absolute high-accuracy deflectometric measurement of topography [5188-39]

    Illemann, J. / International Society for Optical Engineering | British Library Conference Proceedings | 2003




    Fast-scanning ellipsometry for thin film characterization [4099-39]

    Berge, C. / Krasilnikova, A. / Masetti, E. et al. | British Library Conference Proceedings | 2000


    Reliable determination of wavelength dependence of thin film refractive index [5188-25]

    Tikhonravov, A. V. / Trubetskov, M. K. / Amotchkina, T. V. et al. | British Library Conference Proceedings | 2003