Thin film 193-nm TNK measurement using multidomain genetic algorithm (MDGA) with a combination of Beam Profile Reflectometry (BPR), Absolute Ellipsometry (AE), and spectroscopic ellipsometry (SE) [5188-04]
Annual conference, Advanced characterization techniques for optics, semiconductors, and nanotechnologies
2003-01-01
13 pages
Conference paper
English
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