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    Title :

    Theory of a Microwave System for Microwave Plasma Excited Excimer Laser


    Contributors:
    Liu, S. (author) / Huong, D. C. (author) / Zhu, D. (author) / Li, C. (author) / Manos, D. M. (author)

    Conference:

    Annual international conference; 27th, Infrared and millimeter waves ; 2002 ; San Diego, CA



    Publication date :

    2002-01-01


    Size :

    MP4


    Remarks:

    Known as IRMMW 2002. IEEE catalogue no 02EX561; See also 4542.305 vol 23 no 2 2002 for papers



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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