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    Title :

    AIAA-2002-5707 Embedded Electronic Charge MEMS Sensor Technology



    Conference:

    Conference, NanoTech ; 2002 ; Houston, TX


    Published in:

    NanoTech ; 5700/5766 ; 41-47


    Publication date :

    2002-01-01


    Size :

    7 pages



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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