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    Title :

    Electron Cyclotron Resonance Plasma Enhanced Chemical Vapour Deposition (ECR-PECVD): A Versatile Tool in the Fabrication of Optoelectronic Devices



    Conference:

    International symposium; 1st, Integrated optoelectronics ; 2002 ; Philadelphia, PA



    Publication date :

    2002-01-01


    Size :

    20 pages



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English