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    Title :

    Mechanical Behavior of an Electrostatically Actuated Micropump



    Conference:

    43rd, Structures, structural dynamics, and materials conference; 10th AIAA/ASME/ASCE/AHS adaptive structures forum, 4th AIAA non-deterministic approaches forum, 3rd AIAA gossamer spacecraft forum ; 2002 ; Denver, CO



    Publication date :

    2002-01-01


    Size :

    8 pages



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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