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    Title :

    Measurement of the elastic constants of nanometric films [4449-16]



    Conference:

    Conference; 2nd, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2001 ; San Diego, CA



    Publication date :

    2001-01-01


    Size :

    12 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 4449

    DataCite | 1930


    Measurement of steep aspheres: a step forward to nanometer accuracy [4449-25]

    Weingartner, I. / Schulz, M. / Thomsen-Schmidt, P. et al. | British Library Conference Proceedings | 2001


    Microstructure of thin films: correlation with laser damage threshold [4449-35]

    Ciosek, J. / Paszkowicz, W. / Pankowski, P. et al. | British Library Conference Proceedings | 2001


    X-ray study of surfaces and interfaces [4449-31]

    Asadchikov, V. E. / Bukreeva, I. N. / Duparre, A. et al. | British Library Conference Proceedings | 2001


    Measurement of absorptance of optical coatings for F~2 lithography [4449-02]

    Ouchi, C. / Hasegawa, M. / Matsumoto, A. et al. | British Library Conference Proceedings | 2001