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    Title :

    AIAA-2001-4649 Design and Fabrication of a Monolithically Integrated Pressure and Temperature Sensor Using MEMS Processes for Wide Band Gap Materials



    Conference:

    Conference, Space; AIAA space 2001 conference ; 2001 ; Albuquerque, NM



    Publication date :

    2001-01-01


    Size :

    9 pages


    Remarks:

    Separate papers nos AIAA-2001-4513 to AIAA-2001-4777 with gaps. Same papers also held on 171 microfiche at s/m 6369.400F



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





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