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    Title :

    Thin films residual stress measurement by optical profilometry [4596-02]



    Conference:

    Conference; 2nd, Advanced photonic sensors and applications ; 2000 ; Singapore



    Publication date :

    2001-01-01


    Size :

    8 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Multichannel 3D profilometry [4596-27]

    Li, C. / Asundi, A. K. / Fang, Z. P. et al. | British Library Conference Proceedings | 2001


    Nr. 4596

    DataCite | 1933



    Simultaneous microstress and strain measurement with an optical microscope [4596-37]

    Zhao, B. / Asundi, A. K. / SPIE | British Library Conference Proceedings | 2001


    Surface profile measurement using a CD optical pickup head [4596-08]

    Zhong, Z. W. / Tham, W. W. / SPIE | British Library Conference Proceedings | 2001