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    Title :

    Fabrication and etching processes of silicon-based PZT thin films [4414-84]


    Contributors:
    Zhao, H. (author) / Liu, Y. (author) / Liu, J. (author) / Ren, T. (author) / Liu, L. (author) / Li, Z. (author) / Zhou, Y. / Xu, S. / SPIE

    Conference:

    International conference, Sensor technology; (ISTC 2001) ; 2001 ; Wuhan, China



    Publication date :

    2001-01-01


    Size :

    4 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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