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    Title :

    Laser-based measurement to nanometer scale accuracy [4420-22]



    Conference:

    Technical conference, Laser metrology for precision measurement and inspection in industry ; 1999 ; Florianopolis, Brazil



    Publication date :

    2001-01-01


    Size :

    11 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Interferometric length and roughness measurements with nanometer accuracy level [4420-03]

    Titov, A. / Malinovsky, I. / Belaidi, H. et al. | British Library Conference Proceedings | 2001


    Nr. 4420

    DataCite | 1930


    Traceable measurement results from scanning probe microscopes by laser interferometry [4420-21]

    Hasche, K. / Herrmann, K. / Seemann, R. et al. | British Library Conference Proceedings | 2001


    User's guide to IR detectors [4420-09]

    Boreman, G. D. / Society for Optical Engineering / IMEKO - The International Measurement Confederation et al. | British Library Conference Proceedings | 2001


    Camera-based active phase stabilization for electronic holography [4420-18]

    Hrebabetzky, F. / Albertazzi, A. / Veiga, C. L. N. et al. | British Library Conference Proceedings | 2001