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    Title :

    Spectral Interferometric Technique for 3D-Shape Measurement of Microscopic Objects with Improved Resolution, Speed of Measurement and Signal Processing


    Contributors:
    Mehta, D. S. (author) / Sugai, M. (author) / Hinosugi, H. (author) / Saito, S. (author) / Takeda, M. (author) / Kurokawa, T. (author) / Takahashi, H. (author) / Ando, M. (author) / Shishido, M. (author) / Yoshizawa, T. (author)

    Conference:

    Pacific Rim conference; 4th, Lasers and electro-optics; CLEO/Pacific Rim 2001 ; 2001 ; Chiba, Japan



    Publication date :

    2001-01-01


    Size :

    I-472-473


    Remarks:

    Held with InterOpto2001. IEEE cat no 01TH8557



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





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