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    Title :

    Spectrophotometric determination of absorption in the DUV/VUV spectral range for MgF~2 and LaF~3 thin films [4099-35]


    Contributors:

    Conference:

    Conference, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2000 ; San Diego, CA



    Publication date :

    2000-01-01


    Size :

    12 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 4099

    DataCite | 1924


    Investigations of transmittance and reflectance in the DUV/VUV spectral range [4099-36]

    Kadkhoda, P. / Blaschke, H. / Kohlhaas, J. et al. | British Library Conference Proceedings | 2000


    Fast-scanning ellipsometry for thin film characterization [4099-39]

    Berge, C. / Krasilnikova, A. / Masetti, E. et al. | British Library Conference Proceedings | 2000


    New procedure for the optical characterization of high-quality thin films [4099-16]

    Bosch, S. / Leinfellner, N. / Quesnel, E. et al. | British Library Conference Proceedings | 2000


    In-situ ellipsometric measurements of thin film aluminum oxidation [4099-26]

    Lindmark, E. K. / Nowak, J. J. / Kief, M. T. et al. | British Library Conference Proceedings | 2000