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    Title :

    DUV/VUV light scattering measurement of optical components for lithography applications [4099-10]


    Contributors:

    Conference:

    Conference, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2000 ; San Diego, CA



    Publication date :

    2000-01-01


    Size :

    8 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 4099

    DataCite | 1924


    Lithography: a look at what is ahead (Invited Paper) [4099-01]

    Levinson, H. J. / SPIE | British Library Conference Proceedings | 2000


    Optical microscopy at sub-0.1-mum resolution for semiconductor applications [4099-03]

    Vollrath, W. / SPIE | British Library Conference Proceedings | 2000


    Optical characterization of doping profiles in silicon [4099-04]

    Bernini, R. / Zeni, L. / Pierri, R. et al. | British Library Conference Proceedings | 2000


    Advanced methods for surface and subsurface defect characterization of optical components [4099-34]

    Steinert, J. / Gliech, S. / Wuttig, A. et al. | British Library Conference Proceedings | 2000