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    Title :

    Fabrication of a micromachined optical modulator using the CMOS process [4078-94]


    Contributors:
    Chen, H. (author) / Yen, K. (author) / Huang, H. (author) / Chio, J. (author) / Dai, C. (author) / Chang, C. (author) / Chang, P. (author) / Su, Y.-K. / Bhattacharya, P. / SPIE

    Conference:

    Conference; 2nd, Optoelectronic materials and devices ; 2000 ; Taipei



    Publication date :

    2000-01-01


    Size :

    7 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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    Lin, R.-J. / SPIE / Photonics Industry Development Association et al. | British Library Conference Proceedings | 2000


    Nr. 4078

    DataCite | 1923


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    Robinson, B. J. / Yuan, L. / Thompson, D. A. et al. | British Library Conference Proceedings | 2000


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