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    Title :

    Excimer laser surface processing of Si~3N~4 and AIN [4070-29]



    Conference:

    International conference; 8th, Advanced laser technologies; ALT '99 ; 1999 ; Potenza, Italy



    Publication date :

    2000-01-01


    Size :

    8 pages


    Remarks:

    Also held in Lecce, Italy




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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    Nr. 4070

    DataCite | 1923


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