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    Title :

    Automated-interference-lithography-based systems for generation of submicron-feature size patterns (Invited Paper) [3879-14]



    Conference:

    Conference, Micromachine technology for diffractive and holographic optics ; 1999 ; Santa Clara; CA



    Publication date :

    1999-01-01


    Size :

    14 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 3879

    DataCite | 1919


    Fabrication and properties of refractive micro-optical beam-shaping elements (Invited Paper) [3879-01]

    Kley, E.-B. / Wittig, L.-C. / Cumme, M. et al. | British Library Conference Proceedings | 1999


    Micro stereo lithography and fabrication of 3D microdevices [3879-13]

    Varadan, V. K. / Varadan, V. V. | British Library Conference Proceedings | 1999


    High-efficiency computer-generated holograms [3879-16]

    Ferstl, M. / Steingrueber, R. / Fuerst, W. et al. | British Library Conference Proceedings | 1999


    Concept for zero-alignment micro-optical systems [3879-18]

    Levy, R. / Descour, M. R. / Shul, R. J. et al. | British Library Conference Proceedings | 1999