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    Title :

    Micro stereo lithography and fabrication of 3D microdevices [3879-13]



    Conference:

    Conference, Micromachine technology for diffractive and holographic optics ; 1999 ; Santa Clara; CA



    Publication date :

    1999-01-01


    Size :

    8 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 3879

    DataCite | 1919


    Microlens array fabrication through crosslinking photopolymerization [3879-04]

    Croutxe-Barghorn, C. / Soppera, O. / Lougnot, D. J. | British Library Conference Proceedings | 1999


    Fabrication and properties of refractive micro-optical beam-shaping elements (Invited Paper) [3879-01]

    Kley, E.-B. / Wittig, L.-C. / Cumme, M. et al. | British Library Conference Proceedings | 1999


    Concept for zero-alignment micro-optical systems [3879-18]

    Levy, R. / Descour, M. R. / Shul, R. J. et al. | British Library Conference Proceedings | 1999


    Fabrication technique for high-aspect-ratio gratings [3879-07]

    Kley, E.-B. / Fuchs, H.-J. / Zoellner, K. | British Library Conference Proceedings | 1999