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    Title :

    MEMS Low Cost Inertial Grade Accelerometers and Gyros Using a Common, Bulk Micromachining Process


    Contributors:
    Stewart, R. (author) / Abbink, H. (author) / Goldman, A. (author) / Patterson, R. (author) / AIAA

    Conference:

    Guidance, navigation, and control conference ; 1999 ; Portland; OR



    Publication date :

    1999-01-01


    Size :

    7 pages


    Remarks:

    Cover title: A collection of the AIAA guidance, navigation, and control conference technical papers



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





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