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    Title :

    Optical Correlation Technique for Measurement of Roughness at Microfacets of Reflection-type Diffraction Gratings [3573-83]



    Conference:

    Congress; 5th, Modern optics ; 1998 ; Budapest



    Publication date :

    1998-01-01


    Size :

    3 pages


    Remarks:

    Also known as OPTIKA '98




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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