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    Title :

    Microelectromechanical Systems (MEMS): An Overview of Current State-of-the-Art



    Conference:

    Aerospace conference ; 1998 ; Snowmass; CO



    Publication date :

    1998-01-01


    Size :

    8 pages


    Remarks:

    IEEE cat no 98TH8339




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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