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    Title :

    Excimer formation using low-energy electron-beam excitation [3403-43]



    Conference:

    International conference; 2nd, Atomic and molecular pulsed lasers ; 1997 ; Tomsk; Russia



    Publication date :

    1998-01-01


    Size :

    8 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Light sources using energy transfer from excimer to line radiation [3403-45]

    Wieser, J. / Ulrich, A. / Salvermoser, M. et al. | British Library Conference Proceedings | 1998


    Use of Brillouin scattering in excimer lasers [3403-07]

    Losev, V. F. / Panchenko, Y. N. / SPIE; Russia Chapter et al. | British Library Conference Proceedings | 1998


    Present and future trends in excimer-laser-based microlithography [3403-34]

    Tittel, F. K. / Erdelyi, M. / Horvath, Z. L. et al. | British Library Conference Proceedings | 1998


    Nr. 3403

    DataCite | 1910


    Beitler lasers [3403-21]

    Klimkin, V. M. / Sokovikov, V. G. / SPIE; Russia Chapter et al. | British Library Conference Proceedings | 1998