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    Title :

    MEMS actuators and micropositioners for integrated micro-optics (Invited Paper) [3289-18]


    Contributors:

    Conference:

    Conference, Micro-optics integration and assemblies ; 1998 ; San Jose; CA



    Publication date :

    1998-01-01


    Size :

    11 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Integrated micro-optical systems [3289-02]

    Kathman, A. D. / SPIE | British Library Conference Proceedings | 1998


    Integration of polymeric micro-optical elements with planar waveguiding circuits (Invited Paper) [3289-15]

    Eldada, L. A. / Yardley, J. T. / SPIE | British Library Conference Proceedings | 1998


    Nr. 3289

    DataCite | 1908


    Assembly and packaging of liquid-crystal-on-silicon displays (Invited Paper) [3289-09]

    Kazlas, P. T. / Johnson, K. M. / Lee, Y. C. et al. | British Library Conference Proceedings | 1998


    Compact optical encoder approach utilizing novel diffractive optics design [3289-22]

    DeVoe, C. E. / Horwitz, B. A. / Johnson, E. G. et al. | British Library Conference Proceedings | 1998