Fabrication of micro-optical surface profiles by using grayscale masks [3276-29]
Conference; 3rd, Miniaturized systems with micro-optics and micromechanics ; 1998 ; San Jose; CA
1998-01-01
9 pages
Conference paper
English
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DataCite | 1908
Application of micro- and nanotechnologies for the fabrication of optical devices [3276-100]
British Library Conference Proceedings | 1998
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