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    Title :

    MEMS-based diffractive optical-beam-steering technology [3276-07]



    Conference:

    Conference; 3rd, Miniaturized systems with micro-optics and micromechanics ; 1998 ; San Jose; CA



    Publication date :

    1998-01-01


    Size :

    7 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 3276

    DataCite | 1908


    System integration of micro-optical systems for beam steering and modulation applications [3276-08]

    Gloeckner, S. / Dannberg, P. / Goering, R. et al. | British Library Conference Proceedings | 1998


    Fiber optic MEMS pressure sensors based on evanescent field interaction [3276-31]

    Tabib-Azar, M. / Sutapun, B. / Glawe, D. et al. | British Library Conference Proceedings | 1998


    Polymer waveguide cointegration with microelectromechanical systems (MEMS) for integrated optical metrology [3276-11]

    Brown, K. S. / Taylor, B. J. / Dawson, J. M. et al. | British Library Conference Proceedings | 1998


    Nonsilicon micromachining for MOEMS elements [3276-28]

    Chen, Y.-X. / Zhao, X.-L. / Wang, Z.-G. et al. | British Library Conference Proceedings | 1998