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    Title :

    General machining concept for producing micro-optics with high-power UV lasers [2992-22]



    Conference:

    Meeting, Excimer lasers, optics, and applications ; 1997 ; San Jose; CA



    Publication date :

    1997-01-01


    Size :

    9 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Excimer laser machining of advanced materials [2992-17]

    Toenshoff, H. K. / Von Alvensleben, F. / Heekenjann, P. B. et al. | British Library Conference Proceedings | 1997


    Nr. 2992

    DataCite | 1902


    Small excimers opening up new industrial applications [2992-02]

    Ogura, G. / Andrew, R. / SPIE | British Library Conference Proceedings | 1997


    Excimer lasers for material ablation cross the 1.5 kHz mark (Invited Paper) [2992-01]

    Paetzel, R. / Stamm, U. / Bragin, I. et al. | British Library Conference Proceedings | 1997


    High-average-power picosecond-pulse excimer laser system for x-ray generation [2992-06]

    Powers, M. F. / Shields, H. / SPIE | British Library Conference Proceedings | 1997