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    Title :

    One-level gray-tone lithography: mask data preparation and pattern transfer [2783-37]



    Conference:

    Meeting, Micro-optical technologies for measurement, sensors, and microsystems ; 1996 ; Besancon; France



    Publication date :

    1996-01-01


    Size :

    11 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 2783

    DataCite | 1898


    Micro-optics for sensor applications [2783-07]

    Nussbaum, P. / Voelkel, R. / Herzig, H. P. et al. | British Library Conference Proceedings | 1996


    Micro-optic fabrication using one-level gray-tone lithography [3008-32]

    Reimer, K. / Quenzer, H.-J. / Juerss, M. et al. | British Library Conference Proceedings | 1997


    Microspectrometer for the infrared range [2783-27]

    Krippner, P. / Mohr, J. / Mueller, C. et al. | British Library Conference Proceedings | 1996


    Microactuator for microwave antennas [2783-18]

    Chauvel, D. / Collard, D. / Fujita, H. et al. | British Library Conference Proceedings | 1996