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    Title :

    Photodiffractive and photoabsorptive techniques for nondestructive control of semiconducting wafers and structures (Invited Paper) [2113-01]



    Conference:

    International workshop, Optical diagnostics of materials and devices for opto-, micro-, and quantum electronics ; 1993 ; Kiev



    Publication date :

    1994-01-01


    Size :

    10 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Some aspects of thin-film ellipsometry (Invited Paper) [2113-02]

    Bortchagovsky, E. G. / SPIE | British Library Conference Proceedings | 1994


    Laser-thermal diagnostics of multilayer opto- and microelectronic structures (Invited Paper) [2113-29]

    Svechnikov, S. V. / Fedorenko, L. L. / Kaganovich, E. B. et al. | British Library Conference Proceedings | 1994



    Nr. 2113

    DataCite | 1886


    Photoluminescence characterization of silicon subjected to various industrial treatments (Invited Paper) [2113-14]

    Valakh, M. Y. / Rudko, G. Y. / Shakhraychuk, N. I. et al. | British Library Conference Proceedings | 1994