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    Title :

    Laser reactive ablation deposition of titanium nitride and titanium carbide films [2246-10]


    Contributors:

    Conference:

    Conference, Laser materials processing and machining ; 1994 ; Frankfurt; Germany



    Publication date :

    1994-01-01


    Size :

    11 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Laser reactive ablation deposition of thin nitride films

    D'Anna, E. / Leggieri, G. / Luches, A. et al. | IEEE | 1994


    Nr. 2246

    DataCite | 1888


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