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    Title :

    Microspectrophotometric studies of optical waveguide in silicon wafer with buried oxide layer [2321-132]



    Conference:

    2nd International conference, Optoelectronic science and engineering '94 ; 1994 ; Beijing



    Publication date :

    1994-01-01


    Size :

    4 pages


    Remarks:

    Also known as ICOESE '94




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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