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    Title :

    Fabrication of waveguide grating coupler with double corrugation by ion-beam etching technology [2321-127]



    Conference:

    2nd International conference, Optoelectronic science and engineering '94 ; 1994 ; Beijing



    Publication date :

    1994-01-01


    Size :

    3 pages


    Remarks:

    Also known as ICOESE '94




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 2321

    DataCite | 1888


    Nr. 2321

    DataCite | 1890


    Optical endpoint detection of plasma etching and RIE for LSI circuits [2321-69]

    Mi, B. / Song, K. / Hao, D. et al. | British Library Conference Proceedings | 1994


    Waveguide holographic optical elements for optical information processing [2321-167]

    Mehta, P. C. / Nijhawan, O. P. / Chinese Optical Society; Topical Committee on Optoelectronic Technology et al. | British Library Conference Proceedings | 1994