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    Title :

    Roughness measurement on supersmooth surfaces with an optical heterodyne profiler [2004-17]



    Conference:

    Conference, Interferometry VI: applications ; 1993 ; San Diego; CA



    Publication date :

    1994-01-01


    Size :

    9 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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