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    Titel :

    Roughness measurement on supersmooth surfaces with an optical heterodyne profiler [2004-17]



    Kongress:

    Conference, Interferometry VI: applications ; 1993 ; San Diego; CA



    Erscheinungsdatum :

    1994-01-01


    Format / Umfang :

    9 pages




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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