21–40 von 53 Ergebnissen
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    Multilayer reflectance during exposure to EUV radiation [4146-07]

    Oestreich, S. / Klein, R. / Scholze, F. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    Present status of the ASET at-wavelength phase-shifting point diffraction interferometer [4146-05]

    Sugisaki, K. / Zhu, Y. / Gomei, Y. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    Si-based multilayers with high thermal stability [4146-23]

    Kaiser, N. / Yulin, S. / Feigl, T. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    Optimization of air gap for two-dimensional imaging system using synchrotron radiation [4146-21]

    Zeniya, T. / Takeda, T. / Yu, Q. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    Design, fabrication, and characterization of broadband multilayer mirrors for EUV optics at normal incidence [4146-10]

    Wang, Z. / Kun, C. / Ma, Y. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    Mo/Si multilayer coating technology for EUVL: coating uniformity and time stability [4146-06]

    Louis, E. / Yakshin, A. E. / Gorts, P. C. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    Varied-line-spacing laminar-type holographic grating for the standard soft x-ray flat-field spectrograph [4146-22]

    Koike, M. / Namioka, T. / Gullikson, E. M. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    High-precision measurements of the groove density of diffraction gratings [4146-16]

    Cocco, D. / Sergo, R. / Sostero, G. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    High-resolution soft x-ray microscopy [4146-24]

    Chao, W. / Anderson, E. H. / Denbeaux, G. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    Portable diagnostics for EUV light sources [4146-13]

    Stuik, R. / Constantinescu, R. C. / Hegeman, P. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    Laser-generated water plasma source for extreme-ultraviolet lithography and at-wavelength interferometry [4146-11]

    Constantinescu, R. C. / Jonkers, J. / Hegeman, P. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    Mirror substrates for EUV lithography: progress in metrology and optical fabrication technology [4146-04]

    Dinger, U. / Eisert, F. / Lasser, H. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    Optical layout of BACH: a beamline for advanced dichroism at Elettra [4146-15]

    Zangrando, M. / Finazzi, M. / Parmigiani, F. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    Illumination optics design for EUV lithography [4146-03]

    Antoni, M. / Singer, W. / Schultz, J. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    Compact debris shutter design of a laser-produced plasma source for high-NA application [4146-14]

    Yamamoto, M. / Furudate, M. / Sato, N. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    Extreme-ultraviolet source development: a comparison of different concepts [4146-12]

    Schriever, G. / Rahe, M. / Rebhan, U. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    XM-1: the high-resolution soft x-ray microscope at the Advanced Light Source [4146-25]

    Pearson, A. L. / Chao, W. / Denbeaux, G. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    Trends in optical design of projection lenses for UV and EUV lithography [4146-02]

    Ulrich, W. / Beiersdorfer, S. / Mann, H.-J. et al. | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.

    DUV or EUV: that is the question [4146-01]

    Williamson, D. M. / SPIE | British Library Conference Proceedings | 2000
    Beteiligte: Kaiser, W. M.