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Multicrystalline silicon
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The effect of dissociated oxygen on the oxidation of Si, polycrystalline SiC and LPCVD Si3N4
Temperature dependence and drift of a thermal accelerometer (for automobile use)
Technology news. Micromechanical actuators control aircraft wing
Sensor portfolio for automotive applications based on surface micro-machining with thick polysilicon
Motorola and MEMMS: the way up to a surface micromachined accelerometer
Low dimensional structures and devices: micro- and nano-technology
Fabrication technology for an integrated surface-micromachined sensor
Fabrication of large photovoltaic arrays in space from lunar materials