This paper presents a family of micro-machined accelerometers based on a common manufacturing process. This process features a 10 micro m thick polysilicon layer used for the movable sensor structure. The sensing elements are sealed on wafer level with a bulk micro-machined capping wafer. The accelerometers cover a broad range of accelerations. The sensors are packaged in a standard plastic housing (PLCC28) to minimise production costs. Safety systems require crash sensors for a variety of applications such as frontal and side crash detection as well as roll over accidents. Bosch has developed a portfolio of accelerometers based on a surface micro-machined technology. One- or two-channel devices are available with different acceleration ranges from +/-lOg to +/-220g. The portfolio comprises accelerometers for all sensitivity axes. These sensors are the key components for smart, low-cost, and reliable airbag control units.
Sensor portfolio for automotive applications based on surface micro-machining with thick polysilicon
Sensorfamilie für den Einsatz im Fahrzeug auf der Grundlage von Oberflächenapplikationen aus dickem Polysilizium
2000
13 Seiten, 10 Bilder, 1 Tabelle, 4 Quellen
Aufsatz (Konferenz)
Englisch
Sensor Portfolio for Automotive Applications Based on Surface Micro-Machining with Thick Polysilicon
British Library Conference Proceedings | 2000
|Thick film pressure sensors for automotive applications
Kraftfahrwesen | 1981
|Autofocus sensor for micro-machining
British Library Online Contents | 1993
|Automotive sensor applications
Tema Archiv | 1990
|Multi-Level Polysilicon Surface-Micromachining Technology: Applications and Issues
British Library Online Contents | 1996
|