This paper presents a family of micro-machined accelerometers based on a common manufacturing process. This process features a 10 micro m thick polysilicon layer used for the movable sensor structure. The sensing elements are sealed on wafer level with a bulk micro-machined capping wafer. The accelerometers cover a broad range of accelerations. The sensors are packaged in a standard plastic housing (PLCC28) to minimise production costs. Safety systems require crash sensors for a variety of applications such as frontal and side crash detection as well as roll over accidents. Bosch has developed a portfolio of accelerometers based on a surface micro-machined technology. One- or two-channel devices are available with different acceleration ranges from +/-lOg to +/-220g. The portfolio comprises accelerometers for all sensitivity axes. These sensors are the key components for smart, low-cost, and reliable airbag control units.


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    Titel :

    Sensor portfolio for automotive applications based on surface micro-machining with thick polysilicon


    Weitere Titelangaben:

    Sensorfamilie für den Einsatz im Fahrzeug auf der Grundlage von Oberflächenapplikationen aus dickem Polysilizium


    Beteiligte:
    Keim, M. (Autor:in) / Offenberg, M. (Autor:in) / Illing, M. (Autor:in) / Schöfthaler, M. (Autor:in) / Schellin, R. (Autor:in) / Ullmann, D. (Autor:in)


    Erscheinungsdatum :

    2000


    Format / Umfang :

    13 Seiten, 10 Bilder, 1 Tabelle, 4 Quellen



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch





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