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Feinwerktechnik
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keywords:("Feinwerktechnik")
MOEM systems in Europe [3008-01]
LIGA tunable spectral filter performance [3008-33]
Assembling of micro-optical components [3008-27]
Micro-optical modulators and switches for multimode fiber applications [3008-22]
Fabrication of microlens arrays by reactive ion milling [2687-19]
Design and fabrication issues in the development of monolithic micro-optical systems [2687-12]
Photonic crystal fabrication by way of coherent microparticle interaction [3008-36]
Surface-micromachined tunable resonant cavity LED using wafer bonding [3008-04]
Analysis of optical beam steering using phased micromirror arrays [2687-08]
Micromirror arrays for active optical aberration control [2687-02]
Micro-size ball lenses for micro-optics: theory and experiment (Invited Paper) [2687-13]
Optical network of silicon micromachined sensors [2687-10]