Zugriff

    Zugriff über TIB

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    E-beam lithography: an efficient tool for the fabrication of diffractive and micro-optical elements (Invited Paper) [3008-25]



    Kongress:

    Conference, Miniaturized systems with micro-optics and micromechanics II ; 1997 ; San Jose; CA



    Erscheinungsdatum :

    1997-01-01


    Format / Umfang :

    11 pages




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Micro-optic fabrication using one-level gray-tone lithography [3008-32]

    Reimer, K. / Quenzer, H.-J. / Juerss, M. et al. | British Library Conference Proceedings | 1997


    Optical transformer and collimator for efficient fiber coupling (Invited Paper) [3008-19]

    Motamedi, M. E. / Sankur, H. O. / Durville, F. M. et al. | British Library Conference Proceedings | 1997


    Micro-optical and optomechanical systems fabricated by the LIGA technique (Invited Paper) [3008-31]

    Mohr, J. / Goettert, J. / Mueller, A. et al. | British Library Conference Proceedings | 1997


    Micro-opto-electro-mechanical (MOEM) adaptive optic system (Invited Paper) [3008-02]

    Clark, R. L. / Karpinisky, J. R. / Hammer, J. A. et al. | British Library Conference Proceedings | 1997


    Photomask fabrication of focusing diffractive optical elements using electron-beam lithography

    Babin, S. V. / Danilov, V. A. / SPIE | British Library Conference Proceedings | 1995