Synonyme wurden verwendet für: Industrie
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41–60 von 630 Ergebnissen
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    Calibration tool for a CCD-camera-based vision system [4099-19]

    Xu, G. / Tan, S. L. / Low, S. P. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    DUV/VUV light scattering measurement of optical components for lithography applications [4099-10]

    Gliech, S. / Steinert, J. / Flemming, M. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Fast-scanning ellipsometry for thin film characterization [4099-39]

    Berge, C. / Krasilnikova, A. / Masetti, E. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Development of an automated optical system for the analysis of etch pits density and distribution on semiconductor materials [4099-02]

    Dedavid, B. A. / da Costa, E. M. / Soares, A. B. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Diffractive solid immersion lenses: characterization and manufacturing [4449-29]

    Brunner, R. / Bischoff, J. / Rudolf, K. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Combined metrology including VUV spectroscopic ellipsometer and grazing x-ray reflectance for precise characterization of thin films and multilayers at 157 nm [4449-06]

    Boher, P. / Evrard, P. / Piel, J. P. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    New procedure for the optical characterization of high-quality thin films [4099-16]

    Bosch, S. / Leinfellner, N. / Quesnel, E. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Measurement of steep aspheres: a step forward to nanometer accuracy [4449-25]

    Weingartner, I. / Schulz, M. / Thomsen-Schmidt, P. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    IR spectroscopic ellipsometry for industrial characterization of semiconductors [4449-09]

    Boher, P. / Bucchia, M. / Piel, J. P. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Present and future industrial metrology needs for qualification of high-quality optical microlithography materials (Invited Paper) [4449-01]

    Engel, A. / Morsen, E. / Jordanov, A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Characteristics of tantalum oxynitride films prepared by rf magnetron sputtering [4099-30]

    Jong, C. A. / Chin, T. S. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    New purged UV spectroscopic ellipsometer to characterize thin films and multilayers at 157 nm [4099-25]

    Boher, P. / Evrard, P. / Piel, J.-P. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Standardization in optics characterization (Invited Paper) [4099-14]

    Ristau, D. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Multiscale mapping technique for the simultaneous estimation of absorption and partial scattering of optical coatings [4099-11]

    Gatto, A. / Commandre, M. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Investigation on total scattering at 157 nm and 193 nm [4099-09]

    Kadkhoda, P. / Welling, H. / Gunster, S. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Calibration requirements for identifying and sizing wafer defects by scanner measurements [4099-38]

    Stover, J. C. / Scheer, C. A. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    X-ray study of the roughness of surfaces and interfaces [4099-12]

    Kozhevnikov, I. V. / Asadchikov, V. E. / Bukreeva, I. N. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Variable angle spectroscopic ellipsometry in the vacuum ultraviolet (Invited Paper) [4099-24]

    Woollam, J. A. / Hilfiker, J. N. / Tiwald, T. E. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    2D-area/3D-volume holographic optical storage nanotechnology [4099-22]

    Thomas, M. E. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Methods, error influences, and limits for the ultraprecise measurement of slope and figure for large, slightly nonflat, or steep complex surfaces [4099-18]

    Weingartner, I. / Schulz, M. / Thomsen-Schmidt, P. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries