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Industrie
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keywords:("Industrie")
Calibration tool for a CCD-camera-based vision system [4099-19]
DUV/VUV light scattering measurement of optical components for lithography applications [4099-10]
Fast-scanning ellipsometry for thin film characterization [4099-39]
Diffractive solid immersion lenses: characterization and manufacturing [4449-29]
New procedure for the optical characterization of high-quality thin films [4099-16]
Measurement of steep aspheres: a step forward to nanometer accuracy [4449-25]
IR spectroscopic ellipsometry for industrial characterization of semiconductors [4449-09]
Characteristics of tantalum oxynitride films prepared by rf magnetron sputtering [4099-30]
Standardization in optics characterization (Invited Paper) [4099-14]
Investigation on total scattering at 157 nm and 193 nm [4099-09]
Calibration requirements for identifying and sizing wafer defects by scanner measurements [4099-38]
X-ray study of the roughness of surfaces and interfaces [4099-12]
Variable angle spectroscopic ellipsometry in the vacuum ultraviolet (Invited Paper) [4099-24]
2D-area/3D-volume holographic optical storage nanotechnology [4099-22]