Polarized light scattering from metallic particles on silicon wafers [4449-39]
Measurement of the elastic constants of nanometric films [4449-16]
AFM tip calibration using nanometer-sized structures induced by ion beam sputtering [4449-28]
Investigations of transmittance and reflectance in the DUV/VUV spectral range [4099-36]
X-ray investigations of a near surface layer of metal samples [4099-33]
Optical testing of long cylindrical lenses by means of scanning deflectometry [4099-17]
Evaluating optical and supersmooth surface using AFM in optical manufacturing technology [4099-07]
Lithography: a look at what is ahead (Invited Paper) [4099-01]
Quasi-confocal extended field surface sensing [4449-23]
Automated high-accuracy measuring system for specular microreflectivity [4449-15]
Diffractive solid immersion lenses: characterization and manufacturing [4449-29]
Numerical investigation of the resolution in solid immersion lens systems [4099-28]
Present and future interference microscope systems for magnetic head metrology [4099-21]
Measurement of absorptance of optical coatings for F~2 lithography [4449-02]