1–20 von 65 Ergebnissen
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    Polarized light scattering from metallic particles on silicon wafers [4449-39]

    Kim, J. H. / Ehrman, S. H. / Mulholland, G. W. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Measurement of the elastic constants of nanometric films [4449-16]

    Beghi, M. G. / Bottani, C. E. / Bassi, A. L. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    AFM tip calibration using nanometer-sized structures induced by ion beam sputtering [4449-28]

    Frost, F. / Hirsch, D. / Schindler, A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Measuring the scatter distribution of PSL spheres on Si wafers using a fast calibrated CMOS photodetector array [4449-20]

    Rinder, T. / Rothe, H. / SPIE | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Investigations of transmittance and reflectance in the DUV/VUV spectral range [4099-36]

    Kadkhoda, P. / Blaschke, H. / Kohlhaas, J. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    X-ray investigations of a near surface layer of metal samples [4099-33]

    Gilev, O. N. / Asadchikov, V. E. / Duparre, A. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Optical testing of long cylindrical lenses by means of scanning deflectometry [4099-17]

    van Amstel, W. D. / van de Goor, P. F. A. / Horijon, J. L. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Evaluating optical and supersmooth surface using AFM in optical manufacturing technology [4099-07]

    Li, J. / Xiao, S. / Li, X. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Lithography: a look at what is ahead (Invited Paper) [4099-01]

    Levinson, H. J. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Quasi-confocal extended field surface sensing [4449-23]

    Cohen-Sabban, J. / Gaillard-Groleas, J. / Crepin, J.-P. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Automated high-accuracy measuring system for specular microreflectivity [4449-15]

    Grunwald, R. / Nerreter, S. / Tomm, J. W. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Diffractive solid immersion lenses: characterization and manufacturing [4449-29]

    Brunner, R. / Bischoff, J. / Rudolf, K. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Combined metrology including VUV spectroscopic ellipsometer and grazing x-ray reflectance for precise characterization of thin films and multilayers at 157 nm [4449-06]

    Boher, P. / Evrard, P. / Piel, J. P. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Recommendations for the metrological calibration of SPMs: a survey on the European SPMet network project (Invited Paper) [4449-27]

    Rothe, H. / Wilkening, G. / Huser, D. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Standardization of the measurement of laser-induced damage threshold and material absorption [4449-12]

    Wood, R. M. / SPIE | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Numerical investigation of the resolution in solid immersion lens systems [4099-28]

    Bischoff, J. / Brunner, R. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Present and future interference microscope systems for magnetic head metrology [4099-21]

    Caber, P. J. / Olszak, A. G. / Ragan, C. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Feasibility and applicability of integrated metrology using spectroscopic ellipsometry in a cluster tool [4449-10]

    Boher, P. / Piel, J. P. / Stehle, J. L. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Infrared spectroscopic ellipsometry for nondestructive characterization of free-carrier and crystal-structure properties of group-III-nitride semiconductor device heterostructures [4449-08]

    Schubert, M. / Kasic, A. / Figge, S. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Measurement of absorptance of optical coatings for F~2 lithography [4449-02]

    Ouchi, C. / Hasegawa, M. / Matsumoto, A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries