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Feinwerktechnik
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keywords:("Feinwerktechnik")
Nonsilicon micromachining for MOEMS elements [3276-28]
Microlens arrays formed by melting photoresist and ion beam milling [3276-27]
Piezoelectrical elements for micro-optical applications (Invited Paper) [3276-22]
Fabrication of micro-optical surface profiles by using grayscale masks [3276-29]
In-package active fiber optic micro-aligner [3276-20]
MEMS-based microgratings: preliminary results of novel configurations [3276-19]
Strength of indium-phosphide-based microstructures [3008-28]
Micro-opto-electro-mechanical (MOEM) adaptive optic system (Invited Paper) [3008-02]
Optical communication link using a micromachined corner cube reflector [3008-20]
Microjoinery for optomechanical systems [3008-49]
Optical probe for micromachine performance analysis [3008-06]
Micro-optic fabrication using one-level gray-tone lithography [3008-32]
Optimum design of GaAs waveguides intersecting modulator [3276-13]
Optical measurement of LIGA milliengine performance [3276-02]