Synonyme wurden verwendet für: Feinwerktechnik
Suche ohne Synonyme: keywords:("Feinwerktechnik")

1–3 von 3 Ergebnissen
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    Designs to improve polysilicon micromirror surface topology [3008-11]

    Burns, D. M. / Bright, V. M. / SPIE | British Library Conference Proceedings | 1997
    Schlagwörter: micromechanics

    Realizing micro-opto-electro-mechanical devices through a commercial surface-micromachining process (Invited Paper) [2687-05]

    Bright, V. M. / Comtois, J. H. / Sene, D. E. et al. | British Library Conference Proceedings | 1996
    Schlagwörter: micromechanics

    Microactuated mirrors for beam steering [3008-10]

    Gustafson, S. C. / Little, G. R. / Burns, D. M. et al. | British Library Conference Proceedings | 1997
    Schlagwörter: micromechanics